EE I6100 Integrated Circuits: Design and Fabrication I

Introduction to physics of IC processing: epitaxial growth, diffusion, oxidation, ion implantation, evaporation, and sputtering. Bipolar IC processing function, oxide and air isolation, analog IC design, OP amps and other circuits. MOS processing: metal and poly gate and self aligned structure, CMOS. Digital IC design. Analysis of ECL, T2L, I2L and MOS logic design.

Credits

3

Contact Hours

3 hr./wk.